In a process of film (flexible) devices, there is a concern that a processed film devices is damaged while being delaminated when the film device itself is bent in the peeling process. Therefore, our delamination process keeps the film device straight to avoid possible damages, and delamination is done by peeling off a glass substrate.
In flexible device processes, films are made on a flat and smooth glass substrate because it is physically difficult to produce films by using only films. Films alone are too flimsy to secure accurate and stable process.
When a film is delaminated from a glass substrate on which it is made, conventional processes will give damages and it also requires large amount of human intervention. As such, automated process that can delaminate flexible devices from a glass substrate without damages will play an important role.